SUSS MicroTec and NuFlare Technology agree on collaboration

(DGAP-Media / 20.01.2015 / 08:00)

PRESS RELEASE

SUSS MicroTec and NuFlare Technology agree on collaboration

Yokohama, JAPAN and Garching, GERMANY, January 20th, 2015 - NuFlare
Technology, the market leader in electron-beam mask writers and SUSS
MicroTec, a global supplier of equipment and process solutions for the
semiconductor industry and related markets, announced today a cooperation
to combine their expertise in Photomask Equipment and process solutions.
NuFlare Technology will install a SUSS MicroTec MaskTrackPro bake and
develop system into their main manufacturing fab, in Yokohama, Japan, in
early 2015. The MaskTrackPro system is designed and manufactured to meet
the most demanding requirements for masks used in NGL (Next Generation
Lithography), such as EUVL (Extreme-Ultraviolet Lithography), 193i
extension and NIL (Nano-Imprint Lithography). Since its release by SUSS
MicroTec in 2010, more than 30 systems have been shipped to customers
worldwide. NuFlare Technology and SUSS MicroTec will jointly work on
advanced process solutions, closely integrating the latest NuFlare
EB-writer, EBM-9000 and MaskTrackPro.

'In the semiconductor industry, equipment suppliers are responsible for a
smooth and fast start-up of their systems into production.', says Yuta
Nagai, General Manager of SUSS MicroTec Photomask Equipment. 'Our valuable
partnership with NuFlare allows both companies to provide solid turn-key
equipment and technology solutions to mask makers worldwide.'

'Integration between mask writer and develop system is indispensable to
accommodate a tighter accuracy request from our high-end customers. I
believe the collaboration between SUSS MicroTec and NuFlare will allow us
to give them the solution.', says Fumiaki Shigemitsu, President of NuFlare
Technology, Inc.

About NuFlare Technology, Inc.
NuFlare Technology, Inc. was founded in 2002 as a spinoff of the
Semiconductor Equipment Business Division of Toshiba Machine Co., Ltd.
Since then, NuFlare has been active in the development, manufacture, and
sale of electron beam mask writers, mask inspection systems, and epitaxial
growth systems, all devices essential in the drive toward shrinking
physical dimensions and growing sophistication of semiconductor devices.
For more information, please visit http://www.nuflare.co.jp/english/

Contact:
Hirohito Anze, NuFlare Technology, Inc
[e-mail]
[phone]

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In
close cooperation with research institutes and industry partners SUSS