SUSS MicroTec relies on eco-friendly LED-Technology for Mask Aligner

DGAP-Media / 26.04.2016 / 10:45


SUSS MicroTec relies on eco-friendly LED-Technology for Mask Aligner

Garching, April 26, 2016 - SUSS MicroTec, a leading supplier of equipment
and process solutions for the semiconductor and related markets, today
announced the launch of a new UV-LED lamp house for use in its first
exposure tools, which have a leading position in the market for more than
fifty years. SUSS MicroTec strives to bring sustainability and economic
thinking in line with ecological aspects. With the development and
implementation of the environmentally low impact UV-LED lamp house concept
for Mask Aligner, SUSS MicroTec has taken a further important step in terms
of resource conservation and environmental protection.

The new UV-LED light source has a much longer life than conventional
mercury vapor lamps. Moreover, it no longer needs warm-up and cool-down -
the LED light source is only switched on during the actual exposure
process. Both factors contribute to low energy consumption. In terms of
health, safety and environmental protection, the LED technology provides a
significantly improved solution. Finally, the use of LED lighting in
lithography provides for maximum flexibility in process design. It is
therefore an ideal addition to the SUSS Mask Aligner MO Exposure Optics
which ensures optimal exposure results.

"The new LED lamp house features the latest in technology and thus meets
the growing demand for environmental sustainability and energy
efficiency.", says Dr. Per-Ove Hansson, CEO of SUSS MicroTec. "By combining
leading edge innovations with our environmental strategy we not only create
cost benefits for our customers but also protect the environment."

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for
microstructuring in the semiconductor industry and related markets. In
close cooperation with research institutes and industry partners SUSS
MicroTec contributes to the advancement of next-generation technologies
such as 3D Integration and nanoimprint lithography as well as key processes
for MEMS and LED manufacturing. With a global infrastructure for
applications and service SUSS MicroTec supports more than 8.000 installed
systems worldwide. SUSS MicroTec is headquartered in Garching near Munich,
Germany. For more information, please visit www.suss.com




Contact:
SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: [phone]
Fax: [phone]
Email: [e-mail]


End of Media Release

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Issuer: SÜSS MicroTec AG
Key word(s): Research/Technology

26.04.2016 Dissemination of a Press Release, transmitted by DGAP - a service
of EQS Group AG.
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Language: English
Company: SÜSS MicroTec AG
Schleissheimer Strasse 90
85748 Garching
Germany
Phone: [phone]
Fax: [phone]
E-mail: [e-mail]
Internet: www.suss.com
ISIN: DE000A1K0235
WKN: A1K023
Indices: TecDAX
Listed: Regulated Market in Frankfurt (Prime Standard); Regulated
Unofficial Market in Berlin, Dusseldorf, Hamburg, Munich,
Stuttgart


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