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Tegal Awarded Another Key Patent for Advanced Sputter Source BW5308 DEC 16,2004 5:14 PACIFIC 08:14 EASTERN PETALUMA, Calif.--(BUSINESS WIRE)--Dec. 16, 2004-- New Sputter Source Represents Advance in Magnetic Material Deposition and Ionized PVD -- Provides Enabling Capability to Chip Manufacturers Tegal Corporation (Nasdaq:TGAL) today announced that it has beengranted United States Patent No. 6,830,664 for the "cluster tool witha hollow cathode array." The invention provides Tegal with a uniquenew PVD source technology for advanced applications in chipmanufacturing. Direct benefits of this invention include thecapability of providing highly directional deposition of metal atomsand ions, and the easy utilization of magnetic target materials suchas Nickel. Conventional PVD sources are limited by their reliance on strongmagnetic fields. This makes sputtering of magnetic materialsproblematic and inefficient. Nickel films will be needed for contactmetal silicide formation at the 45-nanometer "node" of chipmanufacturing, and in many of the "lead-free" final packaging schemes.The ability to sputter Nickel and other magnetic materials efficientlyalso has many benefits for MRAM, thin film heads and a wide variety ofMEMS applications. The hollow cathode array ("HCA") PVD source uses a different,non-magnetic, physical principle than the conventional magnetron to"trap" electrons, and has the ability to create very high metal ioncontent in the plasma. This is an important benefit, especially inapplications where very deep, narrow features must be evenly coated,such as in barrier and seed layer applications for verticalinterconnect in the newest "chip stack" packaging schemes. "The HCA source will address specific emerging issues in thin filmdeposition that have broad, high volume application. This special PVDsource compliments our recently announced Flat Magnetron and ourwell-developed S-Gun sources, strengthening the portfolio of thin filmdeposition capabilities available in the Endeavor(TM) and Oncore(TM)cluster systems," said Andy Clarke, Tegal´s Director of 300-mm PVDTechnology, and the founder of First Derivative Systems, acquired byTegal earlier this year. Safe Harbor Statement Except for historical information, matters discussed in this newsrelease contain forward-looking statements within the meaning ofSection 27A of the Securities Act and Section 21E of the Exchange Act.Forward-looking statements, which are based on assumptions anddescribe our future plans, strategies and expectations, are generallyidentifiable by the use of the words "anticipate," "believe,""estimate," "expect," "intend," "project" or similar expressions.These forward-looking statements are subject to risks, uncertaintiesand assumptions about the company including, but not limited toindustry conditions, economic conditions, acceptance of newtechnologies and market acceptance of the company´s products andservices. All forward-looking statements attributable to us or personsacting on our behalf are expressly qualified in their entirety by thecautionary statements in this paragraph. For a further discussion ofthese risks and uncertainties, please refer to the company´s periodicfilings with the Securities and Exchange Commission. About Tegal Tegal provides process and equipment solutions to leading edgesuppliers of advanced semiconductor and nanotechnology devices.Incorporating unique, patented etch and deposition technologies,Tegal´s system solutions are backed by over 35 years of advanceddevelopment and over 100 patents. Some examples of devices enabled byTegal technology are energy efficient memories found in portablecomputers, cell phones, PDAs and RFID applications; megapixel imagingchips used in digital and cellphone cameras; power amplifiers forportable handsets and wireless networking gear; and MEMS devices likeaccelerometers for automotive airbags, microfluidic control devicesfor ink jet printers; and laboratory-on-a-chip medical test kits. More information is available on the Internet at: www.tegal.com. --30--NL/sf* CONTACT: Tegal Corporation Andy Clarke, 805-692-2382 aclarke@tegal.com or Loomis Group, Inc. Vincent Mayeda, 909-614-1767 mayedav@loomisgroup.com KEYWORD: CALIFORNIA INDUSTRY KEYWORD: COMPUTERS/ELECTRONICS HARDWARE SOFTWAREMANUFACTURING PRODUCT SOURCE: Tegal CorporationCopyright Business Wire 2004 |
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| aus der Diskussion: | TEGAL mit 2 neuen Patenten |
| Autor (Datum des Eintrages): | JamesBraun (17.12.04 09:56:27) |
| Beitrag: | 14 von 39 (ID:15341881) |
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