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hier weitere Informationen zu partners; Quelle: www.asyst.com OEM Partners An important part of the Asyst solution has been our partnership with original equipment manufacturers (OEMs). Asyst has partnered with over 100 different tool manufacturers such as KLA-Tencor, Lam Research, Novellus, and Silicon Valley Group, Inc. to provide comprehensive SMIF integration. We offer our OEM partners several options specifically designed to meet their clean manufacturing requirements. Products for the OEM market include Asyst`s minienvironment system with sealed containers that encapsulate wafer cassettes and enclosures with engineered airflows that surround process equipment. SMIF-Indexer and SMIF-LPT robotic systems transfer wafer cassettes into and out of process equipment and are an integral component of state-of-the-art systems. Like the SMIF-Arms, the SMIF-Indexer and SMIF-LPT serve as a standard interface port for advanced automation products. The SMIF-LPO represents a SMIF development breakthrough, overcoming the difficult challenge of integrating SMIF I/Os and SMIF-Pods with platform-type wafer processing tools that have no provision for wafer cassette indexing during wafer transfer. Another product enhancement is the inert encapsulation SMIF-E™ System. SMIF-E combines a SMIF-Pod to protect wafers from ambient air with a 200mm SMIF-E Arm™ and an isolated environmental enclosure, maintaining the wafers in an ultra-pure inert gas environment at all times. With this configuration, manufacturers use the SMIF-E interface to encapsulate wafers in an appropriate inert gas environment (e.g., nitrogen, argon, etc.). Nowhere is this more critical than during fabrication steps such as thermal processing, chemical vapor deposition (CVD) and sputtering. Without an inert environment, the oxygen and moisture content in even the cleanest ambient can induce uncontrolled process reactions, leading to both yield losses and longer-term electrical device failures. AST Carl Zeiss, Inc. Four Dimensions, Inc. Hitachi IVS, Inc. Karl Suss, Inc. MRS Technology, Inc. Opal Technologies Rorze Corporation SCP Global Techologies Semitest Ultrapointe Corporation Varian Associates Amray, Inc. ASM Lithography Micrion Corp. Materials Research Corp. Semiconductor Systems, Inc. Solid State Measurements Sugai Corporation Tokyo Electron Ltd. MFG Nickelz |
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| aus der Diskussion: | AXCELIS TECH.-billig,substanz,langfristanlage,TOPTIP,research |
| Autor (Datum des Eintrages): | Nickelz (27.10.00 19:52:47) |
| Beitrag: | 17 von 126 (ID:2199365) |
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