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"Licht und Schatten" in der Lithographie
zur EUV -Technik gehören die Photoresistenten offenbar dazu

http://english.etnews.com/20200110200003

Zitat
.......EUV photoresist especially is used for next-generation semiconductor manufacturing process because EUV is emerging as a potential light source for 7nm microfabrication process ....

Samsung Electronics especially is devoting its heart and soul into introducing a foundry business for EUV process as part of its strategy to become the best system semiconductor company in the world...
 
aus der Diskussion: ASML Holding N.V.
Autor (Datum des Eintrages): bezzz  (11.01.20 10:03:15)
Beitrag: 22 von 494 (ID:62344694)
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