Lam Research Kiyo(R) F Series Enables Critical Conductor Etch for Advanced Memory - Seite 2

Building on Lam's market-leading Kiyo conductor etch products, the Kiyo F Series delivers high productivity while minimizing variability for advanced memory applications. Lam's MMP technology provides advanced profile and CD control for vertical profiles with good selectivity and tuning controls for consistent etch depths. These capabilities enable higher trim rate for 3D NAND staircase etch along with excellent repeatability, which is needed for manufacturing environments. Symmetric chamber design and radial tuning provide best-in-class uniformity, which is essential for minimizing CD variability. For new generations of advanced memory as well as logic devices, MMP technology enables atomic layer etching (ALE), providing extendibility and repeatability with atomic-scale fidelity.

Kiyo F Series has won production and development tool of record positions for critical conductor etch applications at all major memory manufacturers. For 3D NAND, applications include staircase etch and HAR mask open for vertical channel and slit; for DRAM, these include HAR gates, HAR trenches, and metal recess. Because of these wins, the Kiyo F Series installed base has more than tripled in the past 12 months. In addition, due to strong positions at technology inflections, the product is expected to gain significant adoption as next-generation processes move into production.

About Lam Research
Lam Research Corp. (NASDAQ: LRCX) is a trusted global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. Lam's broad portfolio of market-leading deposition, etch, strip, and wafer cleaning solutions helps customers achieve success on the wafer by enabling device features that are 1,000 times smaller than a grain of sand, resulting in smaller, faster, and more power-efficient chips. Through collaboration, continuous innovation, and delivering on commitments, Lam is transforming atomic-scale engineering and enabling its customers to shape the future of technology. Based in Fremont, Calif., Lam Research is a NASDAQ-100 Index® and S&P 500® company whose common stock trades on the NASDAQ® Global Select Market™ under the symbol LRCX. For more information, please visit http://www.lamresearch.com. (LRCX-P)