Compart Systems Adds New Surface Mount Seals and Substrate Technologies, Expanding IP and Product Portfolio for Semiconductor Capital Equipment Customers - Seite 2

The Ultra-Seal and C2W Seal are currently available in market. The iBlock is expected to be available in the third quarter of 2018.

More about iBlock SM

The next generation of SM gas and fluid delivery systems utilized in semiconductor manufacturing requires surface mount substrates and seals capable of handling new chemistries, materials, and processes for 10nm and below geometries.  Compared to existing gas and fluid delivery stick solutions, which use multiple separate substrates, Compart's iBlock SM substrates body is formed from a solid block which improves performance while reducing overall cost.  The increased capabilities of iBlock technology allow for multiple size flow paths to be integrated into the SM gas and fluid system, providing flexibility for variable flow rate and vapor flow applications.  In addition, iBlock's unique porting allows for the elimination of 3-port valves, further reducing the cost of the system.  Compart's iBlock solution has received positive feedback from customers during a rigorous testing, verification, and qualification process. 

Ultra-Seal and C2W Seal

Comparts' Ultra-Seal product is a lower cost C-Seal replacement for SM gas and fluid delivery systems with increased benefits, including a straight flow path without entrapment areas, high temperature capabilities to 300⁰C, and protection of the sealing surface compared to the existing C-Seal product.  Compart also offers a C2W Seal that allows for the integration of two different sealing technologies (C-Seal equivalent and W-Seal). This unique design allows WFE OEM's the flexibility to modify existing higher-cost W-Seal gas and fluid delivery systems by replacing or integrating lower cost C-Seal gas and fluid products with the Ultra-Seal on one side and the W-Seal on the other side. The C2W Seal is a great solution for the existing WFE gas and fluid delivery systems or the secondary or spares markets.    

More about TriClean®

Compart's iBlock, Ultra-Seal, and C2W Seal products are produced using TriClean® material which offers superior performance and reliability compared to existing solutions, while lowering the overall cost of the WFE gas delivery systems. Compart's proprietary TriClean® material is a lower cost, more corrosion resistant SEMI F20 UHP 316L Stainless Steel designed for the inherent environmental challenges of the semiconductor manufacturing process. TriClean® is a Triple Remelt SEMI F20 UHP raw material whose corrosion resistivity properties are greater than 2.5 times the existing industry standard SEMI F20 UHP material. 

About Compart Systems

Compart Systems is a global supplier of precision engineered solutions for critical Semiconductor Manufacturing Equipment components and assemblies for over 30 years. Compart is a vertically integrated technology and IP organization manufacturing industry leading components, surface mount parts, weldments and assemblies including gas sticks and mass flow controllers. 

TriClean® is a registered trademark for Compart Systems Pte., Ltd.