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Tegal Receives Multiple 900 Series Etch Systems Order for MEMS Applications from Leading European Semiconductor Manufacturer
Thursday October 23, 6:00 am ET
Order Firmly Places Tegal among Industry Leaders in Enabling MEMS and Nanotechnology Development


PETALUMA, Calif.--(BUSINESS WIRE)--Oct. 23, 2003-- Tegal Corporation (Nasdaq:TGAL - News) today announced a large European semiconductor manufacturer has ordered two Tegal 980 Series diode plasma etch systems, which will be of key importance for its expansion into fabricating commercial quantities of specialized MEMS (Microelectromechanical Systems) and other nanotechnology devices. Tegal`s technical support, process development expertise, and experience and capabilities in etching unique materials were major factors in this order win. Tegal expects the two etch systems to be installed at the chipmaker`s fab in January 2004.
MEMS, and the related field of nanotechnology-based devices, are recognized as being enabling technologies for new microelectronic device applications such as the wide array of accelerometers, RF switches, and microsensors now being deployed in the automotive, communication, medical, and consumer electronics markets. According to a July 2003 report from In-Stat/MDR, worldwide MEMS revenues will exceed $8 billion by 2007, more than doubling from 2002 levels. MEMS and nanotechnology devices are increasingly incorporating a variety of new materials, whose properties allow the devices to operate in harsh " real world" environments. This creates the need for new approaches to wafer processing -- particularly in the critical areas of deposition and etching processes.

" Tegal has long been known in the industry as a provider of novel approaches for plasma etching," said Jim McKibben, Tegal`s vice president of worldwide marketing and sales. " Nanotechnology development, in many cases, is more aggressive than semiconductor development. Tegal`s long-term unwavering commitment to new materials R&D has positioned the company well for the predicted MEMS and nanotechnology market growth."

Tegal`s plasma etch tools are already widely used for the commercial fabrication of MEorld. More information is available on the Internet at www.tegal.com.

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